Microresonator, band-pass filter, semiconductor device, and...

Details Microresonator, band-pass filter, semiconductor device, and... Microresonator, band-pass filter, semiconductor device, and...

2006-05-05

2008-12-09

Kinkead, Arnold (Department: 2817)

Oscillators

Electromechanical resonator

C331S1160FE, C333S186000, C333S192000

Reexamination Certificate

active

07463105

ABSTRACT:
A microresonator includes a plurality of beam-type oscillator elements arranged in parallel and to which DC voltages are applied, wherein the DC voltages are caused to be different among the oscillator elements.

REFERENCES:
patent: 7098757 (2006-08-01), Avazi et al.
Clark T. C. Nguyen; Microelectromechanical Components for Miniaturized Low-Power Communications; 1999 IEEE MTT-S International Microwave Symposium RF MEMS Workshop; Anaheim, California; Jun. 18, 1999.

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