Microresonator

Details Microresonator Microresonator

2008-11-06

2010-12-28

Dougherty, Thomas M (Department: 2837)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S042000, C438S045000, C438S051000, C310S309000

Reexamination Certificate

active

07858407

ABSTRACT:
A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.

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