Microrelays and microrelay fabrication and operating methods

Details Microrelays and microrelay fabrication and operating methods Microrelays and microrelay fabrication and operating methods

2004-11-02

2008-12-09

Enad, Elvin (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07463125

ABSTRACT:
Microrelays and microrelay fabrication and operating methods providing a microrelay actuator positively controllable between a switch closed position and a switch open position. The microrelays are a five terminal device, two terminals forming the switch contacts, one terminal controlling the actuating voltage on an actuator conductive area, one terminal controlling the actuating voltage on a first fixed conductive area, and one terminal controlling the actuating voltage on a second fixed conductive area deflecting the actuator in an opposite direction than the first fixed conductive area. Providing the actuating voltages as zero average voltage square waves and their complement provides maximum actuating forces, and positive retention of the actuator in both actuator positions. Various fabrication techniques are disclosed.

REFERENCES:
patent: 5278368 (1994-01-01), Kasano et al.
patent: 5367429 (1994-11-01), Tsuchitani et al.
patent: 5479042 (1995-12-01), James et al.
patent: 5544001 (1996-08-01), Ichiya et al.
patent: 6162657 (2000-12-01), Schiele et al.
patent: 6239685 (2001-05-01), Albrecht et al.
patent: 6396372 (2002-05-01), Sakata et al.
patent: 6486425 (2002-11-01), Seki
patent: 6633212 (2003-10-01), Ruan et al.
patent: 6734513 (2004-05-01), Seki et al.
patent: 6734770 (2004-05-01), Aigner et al.
patent: 6872902 (2005-03-01), Cohn et al.
patent: 2002/0160549 (2002-10-01), Subramanian et al.
patent: 2003/0006868 (2003-01-01), Aigner et al.
patent: 2004/0113732 (2004-06-01), Delamare et al.
Yao, J. Jason et al., “A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC up to 4 GHz”, Tech. Digest, 8th Int. Conf. on Solid-State Sensors and Actuators, 1995, pp. 384-387.
Schlaak, Helmut F. et al., “Silicon-Microrelay—A Small Signal Relay with Electrostatic Actuator”, Proc. 4th Relay Conf., 1997, pp. 10.1-10.7.
Zavracky, Paul M. et al., “Micromechanical Switches Fabricated Using Nickel Surface Micromaching”, Journal of Microelectromechanical Systems, Mar. 1997, pp. 3-9, vol. 6, No. 1.
Sakata, M. et al., “Micromachined Relay which Utilizes Single Crystal Silicon Electrostatic Actuator”, Tech. Digest, 12th IEEE Conf. on Micro Electro Mechanical Systems, 1999, pp. 21-24.
Suzuki, Kenichiro et al., “A Micromachined RF Microswitch Applicable to Phased-Array Antennas”, Tech. Digest, IEEE Microwave Theory Techniques Symp., 1999, pp. 1923-1926.
Hyman, D. et al., “GaAs-compatible surface-micromachined RF MEMS switches”, Electronics Letters, Feb. 4, 1999, pp. 224-226, vol. 35, No. 3.

Affiliated with

Also associated with

Rating

Microrelays and microrelay fabrication and operating methods does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microrelays and microrelay fabrication and operating methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microrelays and microrelay fabrication and operating methods will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4029855