Micropumps with fixed valves

Pumps – Motor driven – Magnetostrictive chamber

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Details

4174132, 137814, 137826, 137833, F04B 1700

Patent

active

058761870

ABSTRACT:
Micropumps fabricated by micromachining techniques and employing fixed or no-moving-parts valves. As one aspect of the invention, a laser-assisted chemical etching technique is employed for providing smooth-walled, curved configuration necessary to obtain the desired flow characteristics of the valves that are used in conjunction with the micropump.

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