Micropump having a constant output

Details Micropump having a constant output Micropump having a constant output

1990-04-04

1992-02-04

Rivell, John

Pumps

Motor driven

Electric or magnetic motor

417412, 417322, F04B 3504

Patent

active

050855620

ABSTRACT:
A micropump comprising a pumping chamber, an inlet channel communicating with the pumping chamber by an inlet valve and an outlet channel communicating with the pumping chamber via an outlet valve, these elements being manufactured by etching a silicon wafer is then sealed to glass wafers, the micropump also comprising a piezoelectric wafer to vary the volume of the pumping chamber by bending a wall forming part of the wall of this pumping chamber. In accordance with the invention the pumping chamber has a stop which determines the amplitude of movement of the flexible wall. The variation in the volume of the chamber caused by the displacement of the flexible wall is precisely defined, thus making it possible to maintain the output of the micropump constant during normal operating conditions.

REFERENCES:
patent: 3150592 (1964-09-01), Stec
patent: 3215078 (1965-11-01), Stec
patent: 4265600 (1981-05-01), Mandroian
patent: 4265601 (1981-05-01), Mandroian
patent: 4708600 (1987-11-01), AbuJudom, II et al.
patent: 4911616 (1990-03-01), Laumann, Jr.
patent: 4938742 (1990-07-01), Smits
Article entitled "Sensors and Actuators" by Harald van Lintel, vol. 15, No. 2, pp. 154-167, dated Oct. 2, 1988.

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