Micropump

Details Micropump Micropump

1995-07-27

1997-03-18

Gluck, Richard E.

Pumps

Motor driven

Magnetostrictive chamber

4174132, F04B 4304

Patent

active

056116764

ABSTRACT:
A micropump is disclosed including an input port, an output port, a fluid channel space located therebetween, a first oscillating member for opening or closing between the fluid channel space and the input port, a second oscillating member for opening or closing between the fluid channel space and the output port, and at least one third oscillating member for reducing/enlarging the volume of the fluid channel space. The micropump is provided with pressure correcting means which applies a pressure, substantially equal to a fluid pressure at the input port, to a space located outside the fluid channel space and in which the first oscillating member oscillates.

REFERENCES:
patent: 5215446 (1993-06-01), Takahashi et al.
patent: 5259737 (1993-11-01), Kamisuki et al.
patent: 5288214 (1994-02-01), Fukuda et al.

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