Micropositioning devices, using single-crystal piezoelectric bod

Details Micropositioning devices, using single-crystal piezoelectric bod Micropositioning devices, using single-crystal piezoelectric bod

1995-10-18

1998-04-14

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

057396248

ABSTRACT:
A piezoelectric micropositioning device includes, in one embodiment, four single-crystal piezoelectric bodies cut in the form of single-crystal parallel slabs from a single larger single crystal. Each of the single-crystal slabs has a separate electrode attached to an opposing major surface. One of the end faces of each of the slabs is fixed to a substrate; the other of the end faces is fixed to a holder. In response to voltages applied to the electrodes, the holder can be moved in two or three linearly independent directions, depending upon the applied voltages. In another embodiment, only a single piezoelectric body, preferably in the shape of a column and in conjunction with at least four electrodes located on the side surfaces of the column, is required for such motion in two or three directions.

REFERENCES:
patent: 4785177 (1988-11-01), Besocke
patent: 4877957 (1989-10-01), Okada et al.
patent: 5306919 (1994-04-01), Elings et al.
patent: 5371365 (1994-12-01), Watanabe et al.
patent: 5453653 (1995-09-01), Zumeris
patent: 5640063 (1997-06-01), Zumeris
Pending patent application Ser. No. 08/328,297 filed in the United States on Oct. 24, 1994, (Marchman 10-11).
Chapter 9 in book "Introduction to Scanning Tunneling Microscopy," by C. Julian Chen, IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, New York. Chapter 9 entitled Piezoelectric Scanner, pp. 213-235.

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