Electricity: motive power systems – Positional servo systems – Multiple mode systems
Patent
1996-05-28
1998-09-15
Martin, David S.
Electricity: motive power systems
Positional servo systems
Multiple mode systems
318652, 360 7805, 360165, G05B 1118
Patent
active
058084355
ABSTRACT:
A micropositioner has a coarse positioner and a fine positioner, with a separate closed loop control circuit for the fine positioner. A disk head being positioned over a disk is attached to the stage of the fine positioner. The fine positioner includes a parallelogram flexure having first and second opposite sides attached respectively to the coarse positioning stage and the fine positioning stage. A piezoelectric translator translates the second side of the flexure relative to the coarse positioning stage. In order to sense displacement of the fine positioning stage relative to the coarse positioning stage, a differential electric field sensor is employed. The sensor includes a pair of side plates both mounted fixedly relative to one of the stages and opposing each other to create an electrical field between them, and a probe plate mounted fixedly relative to the other of the two stages and between the two side plates. As the second stage moves relative to the first, the voltage sensed by the probe plate is fed back to control the piezoelectric translator until the probe voltage indicates that the fine displacement amount matches a desired fine displacement amount indicated by a command signal. In an embodiment, the fine positioner feedback loop controls the voltages applied to the side plates such that the voltage sensed by the probe plate is zero whenever the fine positioner is at equilibrium.
REFERENCES:
patent: 3818341 (1974-06-01), Burdick
patent: 3900782 (1975-08-01), Hammerschmitt
patent: 3904945 (1975-09-01), Hassan et al.
patent: 4087715 (1978-05-01), Myer
patent: 4223257 (1980-09-01), Miller
patent: 4227182 (1980-10-01), Ogasawara et al.
patent: 4309730 (1982-01-01), Sanderson
patent: 4326155 (1982-04-01), Griebeler
patent: 4327383 (1982-04-01), Holt
patent: 4333116 (1982-06-01), Schoettle et al.
patent: 4506154 (1985-03-01), Scire
patent: 4561028 (1985-12-01), Guisinger
patent: 4694477 (1987-09-01), Siddall
patent: 4702101 (1987-10-01), Abbe et al.
patent: 4722010 (1988-01-01), Suzuki et al.
patent: 4727278 (1988-02-01), Staufenberg, Jr. et al.
patent: 4811246 (1989-03-01), Fitzgerald et al.
patent: 4823205 (1989-04-01), Hannon et al.
patent: 4829545 (1989-05-01), Guzik et al.
patent: 4831246 (1989-05-01), Wallentine et al.
patent: 4836916 (1989-06-01), Kondo et al.
patent: 4843293 (1989-06-01), Futami
patent: 4850695 (1989-07-01), Mikuriya et al.
patent: 4893071 (1990-01-01), Miller
patent: 4902971 (1990-02-01), Guzik et al.
patent: 4958839 (1990-09-01), Guzik et al.
patent: 4988945 (1991-01-01), Nagase
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5027645 (1991-07-01), Leitmeier et al.
patent: 5128812 (1992-07-01), Uno
patent: 5198777 (1993-03-01), Masuda et al.
patent: 5204932 (1993-04-01), Shinohara et al.
patent: 5220408 (1993-06-01), Mager
patent: 5229679 (1993-07-01), Higuchi et al.
patent: 5254946 (1993-10-01), Guzik
patent: 5257093 (1993-10-01), Mager et al.
patent: 5262707 (1993-11-01), Okazaki et al.
patent: 5269190 (1993-12-01), Kramer et al.
patent: 5270883 (1993-12-01), Umeyama
patent: 5355261 (1994-10-01), Taratorin
patent: 5359474 (1994-10-01), Riederer
patent: 5382887 (1995-01-01), Guzik et al.
patent: 5394096 (1995-02-01), Meyer
patent: 5424597 (1995-06-01), Gloss et al.
patent: 5455720 (1995-10-01), Norton
patent: 5463259 (1995-10-01), Zimmer
Bonse, M.H.W., "Finite-element modelling as a tool for designing capacitive position sensors", Sensors and Actuators A (Physical), (Jan.-Feb. 1995), vol. A46, No. 1-3, pp. 266-269.
Desogus, et al., "Capacitive sensors coupled to a scanning tunneling microscope piezoscanner for accurate measurements of the tip displacements", Journal of Vacuum Science & Technology B, Second Series, vol. 12, No. 3, May./Jun. 1994, pp. 4-6.
Peters, et al., "an inexpensive synchronous detector and its application to differential capacitance sensors", Review of Scientific Instruments (Aug. 1992), vol. 63, No. 8, pp. 3989-3992.
Sanada, K., "Noncontact evaluation of capacitance disk memory with ferroelectric/semiconductor structure", Japanese Journal of Applied Physics, Part 1 (Nov. 1994), Vol. 33, No. 11, pp. 6383-6388.
KMY Instruments
Martin David S.
LandOfFree
Micropositioning device for disk head testing system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micropositioning device for disk head testing system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micropositioning device for disk head testing system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-91983