Micropositioning device

Details Micropositioning device Micropositioning device

1986-08-27

1989-02-21

Aschenbrenner, Peter A.

Horizontally supported planar surfaces

Power driven

74519, G01B 500

Patent

active

048055433

ABSTRACT:
A micropositioning device having a plurality of degrees of freedom is provided. This device is particularly useful in guiding optic components. The device has N degrees of freedom and comprises two rigid members, namely a reference base and a movable platform. The reference base and the movable platform are connected by N independent chains. Each chain consists of N elastic guide means with a single degree of freedom, arranged in series, and an actuator fixed to the reference base.

REFERENCES:
patent: 3124018 (1964-03-01), Gough
patent: 4012111 (1977-03-01), Masterson
patent: 4312126 (1982-01-01), Rochelt
patent: 4559717 (1985-12-01), Scire et al.
patent: 4595257 (1986-06-01), Fladien
patent: 4649762 (1987-03-01), Messinger et al.
patent: 4688908 (1987-08-01), Moore
J. Phys. E: Sci. Instrum. vol. 17, 1984. Printed in Great Britain, Instrument Science and Technology, "Elastic Design of Fine Mechanism in Instruments", by P. H. Sydenham.
"Moving Stage Improves Accuracy of Microcircuit Measuring Technique"; by Russell D. Young, R. D. Young Consultants Inc., Apr. 1984.

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