Micropolarimeter, microsensor system and method of characterizin

Details Micropolarimeter, microsensor system and method of characterizin Micropolarimeter, microsensor system and method of characterizin

1994-06-28

1996-03-26

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With polariscopes

356369, G01J 400

Patent

active

055025676

ABSTRACT:
A micropolarimeter comprises an analyzer (1) and a detector (3), which is typically a photodetector array. The detector has a circular configuration of a number N of sectors. Analyzer (1) and detector (3) form a unit with the analyzer assigning different polarization values to the sectors. Analyzer and the detector contain no moving parts. Three different embodiments are proposed for the analyzer: a glass cone, covered with a polarizing thin film stack, a metal grid polarizing array, and an array of polarizing waveguides. The micropolarimeter (14) is used preferably in a microellipsometer system which can serve as a tool for film diagnostics, especially optical characterization of thin films.

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R. M. A. Azzam et al., "Ellipsometry and Polarized Light", 1988, North Holland, Amsterdam, pp. x-xvii.

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