Micropoint switch for use with field emission display and method

Details Micropoint switch for use with field emission display and method Micropoint switch for use with field emission display and method

1997-01-07

1999-09-14

Patel, Vip

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313336, 313351, H01J 102

Patent

active

059527714

ABSTRACT:
A micropoint assembly is disclosed that includes a micropoint and a switch coupled to the micropoint. The switch is operable to activate and deactivate the micropoint and includes a nitride oxidation layer. The switch may be a MOSFET with a gate oxide that contains the nitride oxidation layer. In such configuration, the nitride oxidation layer contains the greatest concentration of SiN within the gate oxide. A method for constructing the micropoint assembly and field emission displays incorporating the micropoint assembly is also disclosed. Such method includes simultaneous annealing of the nitride oxidation layer during conventional FED fabrication steps.

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