Microphotonic waveguide including core/cladding interface layer

Details Microphotonic waveguide including core/cladding interface layer Microphotonic waveguide including core/cladding interface layer

2007-09-05

2010-11-09

Connelly Cushwa, Michelle R (Department: 2874)

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

C385S129000, C385S130000, C385S132000

Reexamination Certificate

active

07831123

ABSTRACT:
The invention provides a waveguide with a waveguide core having longitudinal sidewall surfaces, a longitudinal top surface, and a longitudinal bottom surface that is disposed on a substrate. An interface layer is disposed on at least one longitudinal sidewall surface of the waveguide core. A waveguide cladding layer is disposed on at least the waveguide core sidewall and top surfaces, over the interface layer. The waveguide of the invention can be produced by forming a waveguide undercladding layer on a substrate, and then forming a waveguide core on the undercladding layer. An interface layer is then formed on at least a longitudinal sidewall surface of the waveguide core, and an upper cladding layer is formed on a longitudinal top surface and on longitudinal sidewall surfaces of the waveguide core, over the interface layer.

REFERENCES:
patent: 5562838 (1996-10-01), Wojnarowski et al.
patent: 6487354 (2002-11-01), Ferm et al.
patent: 6775453 (2004-08-01), Hornbeck et al.
patent: 7289712 (2007-10-01), Kim et al.
patent: 2001/0041027 (2001-11-01), Hornbeck et al.
patent: 2002/0021879 (2002-02-01), Lee et al.
patent: 2004/0109659 (2004-06-01), Aylward et al.
patent: 2007/0147762 (2007-06-01), Kwakernaak et al.
patent: 0819956 (1998-01-01), None
patent: 08304644 (1996-11-01), None
patent: WO 03/060569 (2003-07-01), None
patent: WO 03/060569 (2003-07-01), None
WO 2008/030468 A3 International Search Report for PCT/US2007/019356, Mar. 13, 2008.
International Preliminary Report on Patentability for PCT/US2007/019356, Mar. 19, 2009.
Sparacin et al., “Low Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” IEEE 3rd Int. Conf. On Group IV Photonics, pp. 255-257, Oct. 9, 2006.
Sparacin et al., “Low Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” slide presentation at IEEE 3rd Int. Conf. On Group IV Photonics, Session FD:Waveguides II, Sep. 15, 2006.
Sparacin, “Process and Desing Techniques for Low Loss Integrated Silicon Photonics,” Ph.D. Thesis, Massachusetts Institute of Technology, acessioned and available Jun. 28, 2007.
Borselli et al., “Surface Encapsulation for Low-Loss Silicon Photonics,” Appl. Phys. Letts., V. 91, pp. 13117, Sep. 28, 2007.

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