Thermal measuring and testing – Differential thermal analysis
Patent
1998-06-30
2000-06-27
Gutierrez, Diego
Thermal measuring and testing
Differential thermal analysis
374 31, 374 12, 422 51, 422 95, G01N 2500
Patent
active
060798734
ABSTRACT:
A differential scanning microcalorimeter produced on a silicon chip enables microscopic scanning calorimetry measurements of small samples and thin films. The chip may be fabricated using standard CMOS processes. The microcalorimeter includes a reference zone and a sample zone. The reference and sample zones may be at opposite ends of a suspended platform or may reside on separate platforms. An integrated polysilicon heater provides heat to each zone. A thermopile consisting of a succession of thermocouple junctions generates a voltage representing the temperature difference between the reference and sample zones. Temperature differences between the zones provide information about the chemical reactions and phase transitions that occur in a sample placed in the sample zone.
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Cavicchi Richard E.
Gaitan Michael
Poirier Gregory Ernest
Suehle John S.
Tea Nim H.
De Jesus Lydia
Gutierrez Diego
Rohrer Charles E.
The United States of America as represented by the Secretary of
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