Micromotion stage

Details Micromotion stage Micromotion stage

1995-02-16

1996-04-30

Underwood, Donald W.

Material or article handling

Vertically swinging load support

7449009, 310317, 310328, 901 28, B25T 1100

Patent

active

055119310

ABSTRACT:
A micromotion stage comprises a stationary plate and a moving plate connected by six links each consisting of a stacked piezoelectric element serving as an actuator, a holder fixed at one end of the stacked piezoelectric element, a capacitance type displacement gage retained by the holder and a target member fixed at the other end of the stacked piezoelectric element to have a part thereof face a tip portion of the capacitance type displacement gage across a small gap. Change in the distance between the holder and the target member caused by expansion or contraction of the stacked piezoelectric element and indicative of a change in the link stroke can be detected by the capacitance type displacement gage.

REFERENCES:
patent: 4525852 (1985-06-01), Rosenberg
patent: 4785177 (1988-11-01), Besocke

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