Micromodules including integrated thin film inductors

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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C257S532000, C257S737000, C361S760000, C361S765000

Reexamination Certificate

active

07838964

ABSTRACT:
Micromodules and methods of making them are disclosed. An exemplary micromodule includes a substrate having a thin film inductor, and a bumped die mounted on the substrate and over the thin film inductor.

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