Micromirrors with lower driving voltages

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S291000, C359S295000, C359S223100, C359S224200

Reexamination Certificate

active

11121543

ABSTRACT:
A micromirror device with a lower driving voltage is disclosed. The lower driving voltage is achieved by projecting a partial light for image display during a micromirror is oscillating from fully on state to a fully off state. The micromirror device includes a reflective element supported on a hinge for oscillating and positioning at least three states. These three states are a fully on state, a fully off state, and a partially ON angular positions in responding to a digital control signal. The oscillation of the micromirrors is controlled by a two bits signal inputted to two electrodes for controlling the voltage of these electrodes respectively. The micromirrors are further controlled to change the oscillation direction at an angular position between the fully on and fully off positions at a fraction of an oscillation cycle. With these inventive features, the micromirrors are controllable to provide higher ranges of gray scales without increasing the driving voltage.

REFERENCES:
patent: 2003/0156104 (2003-08-01), Morita
patent: 2003/0214639 (2003-11-01), Patel et al.
patent: 2005/0254116 (2005-11-01), Ishii

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