Micromirrors with asymmetric stopping mechanisms

Details Micromirrors with asymmetric stopping mechanisms Micromirrors with asymmetric stopping mechanisms

2005-04-05

2005-04-05

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S220100

Reexamination Certificate

active

06876485

ABSTRACT:
A micromirror device comprises a plurality of stopping mechanisms that sequentially stop the mirror plate of the micromirror device when the micromirror device is rotating towards a state, such as an ON or OFF state. The mirror plate sequentially separates from the stopping mechanisms when the mirror plate is rotating towards another state, such as the OFF or ON state.

REFERENCES:
patent: 5212582 (1993-05-01), Nelson
patent: 6147790 (2000-11-01), Meier et al.
patent: 6381381 (2002-04-01), Takeda et al.
patent: 6396619 (2002-05-01), Huibers et al.
patent: 6522454 (2003-02-01), Meier et al.
patent: 6552840 (2003-04-01), Knipe
patent: 20040114110 (2004-06-01), Shin

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