Micromirrors for micro-electro-mechanical systems and...

Details Micromirrors for micro-electro-mechanical systems and... Micromirrors for micro-electro-mechanical systems and...

2006-11-21

2006-11-21

Dang, Hung X. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C427S166000

Reexamination Certificate

active

07139111

ABSTRACT:
A micromirror for micro-electro-mechanical systems. The micromirror comprises a pad layer, a doped aluminum layer containing 0.002 wt % to 0.3 wt % of silicon overlying the pad layer and a protective layer overlying the doped aluminum layer.

REFERENCES:
patent: 6778315 (2004-08-01), Guo et al.
patent: 6800210 (2004-10-01), Patel et al.
patent: 7022249 (2006-04-01), Valette
patent: 7023606 (2006-04-01), Huibers
patent: 7057794 (2006-06-01), Wang et al.
patent: 2004/0223240 (2004-11-01), Huibers

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