Micromirror devices with in-plane deformable hinge

Details Micromirror devices with in-plane deformable hinge Micromirror devices with in-plane deformable hinge

2007-05-08

2007-05-08

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100, C359S224200

Reexamination Certificate

active

11056732

ABSTRACT:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

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