Micromirror device having a vertical hinge

Details Micromirror device having a vertical hinge Micromirror device having a vertical hinge

2011-03-22

2011-03-22

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S224100

Reexamination Certificate

active

07911680

ABSTRACT:
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes. The mirror device further comprises a barrier layer is disposed between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Furthermore, this invention discloses a projection apparatus implemented with a mirror device manufactured and assembled according to the configuration as described.

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patent: 7068417 (2006-06-01), Yang
patent: 7233428 (2007-06-01), Yang

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