Micromirror array device and a method for making the same

Details Micromirror array device and a method for making the same Micromirror array device and a method for making the same

2006-12-19

2006-12-19

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100, C359S224200

Reexamination Certificate

active

07151628

ABSTRACT:
The spatial light modulator of the present invention comprises an array of micromirrors, each of which has a reflective deflectable mirror plate. A set of posts are provided for holding the mirror plates on a substrate, but not all micromirrors of the micromirror array have posts.

REFERENCES:
patent: 6381381 (2002-04-01), Takeda et al.
patent: 2004/0035821 (2004-02-01), Doan et al.

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