Micromirror actuator and manufacturing method thereof

Details Micromirror actuator and manufacturing method thereof Micromirror actuator and manufacturing method thereof

2005-08-16

2005-08-16

Palmer, Phan T. H. (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S016000, C359S291000

Reexamination Certificate

active

06931171

ABSTRACT:
An actuator which can be actively driven so as to precisely control a driving angle of a micromirror, and a manufacturing method thereof are provided. The micromirror actuator includes a substrate, a trench, a micromirror, and a driving angle control unit. The trench is formed in a predetermined position of the substrate and has at least one electrode. The micromirror rotates by an electrostatic force generated through an interaction with the at least one electrode so as to reflect incident light in a predetermined direction. The driving angle control unit supports the micromirror so as to control the position of an actuation shaft of the micromirror. Accordingly, the micromirror can stand erect at an accurate right angle without an additional actuator for correcting the error in the driving angle of the micromirror so as to reduce insertion loss.

REFERENCES:
patent: 6760143 (2004-07-01), Yoon

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