Pumps – Motor driven – Electric or magnetic motor
Patent
1992-10-20
1994-08-09
Casaregola, Louis J.
Pumps
Motor driven
Electric or magnetic motor
417413B, F04B 1700
Patent
active
053360621
ABSTRACT:
A microminiaturized pump consists of two superposed, interconnected pump bodies of semiconductor material, which each include electrically conductive regions insulated from one another. At least one of the two pump bodies has a thin, flexible diaphragm having integrated therein at least one check valve, which has an inlet aperture and a cover plate over it, the thin, flexible diaphragm including at least part of the electrically conductive region of one pump body, whereas, in relation to the surface dimensions of the thin, flexible diaphragm, the electrically conductive region of the other pump body is arranged at a short distance from the thin, flexible diaphragm.
REFERENCES:
patent: 3963380 (1976-06-01), Thomas et al.
patent: 5224843 (1993-07-01), Lintel
Van De Pol et al., "A Piezoelectric Micropump based on Micromachining of icon", Sensors and Actuators, Feb. 1988, pp. 153-167.
Ohnstein et al., "Micromachined Silicon Microvalve", Apr. 1990, pp. 95-98.
Richter et al., "An Electrohydrodynamic Micropump", 3rd IEEE Workshop on Micro Electro Mechanical Systems, Feb. 1990.
Peterson, "Silicon as a Mechanical Material", Proceedings of the IEEE, vol. 70, No. 5, May 1982.
Eashi et al., "Normally Closed Microvalve and Micropump Fabricated on a Silicon Vapor", Sensors and Actuators, 20, Feb. 1989, pp. 163-169.
Basichas Alfred
Casaregola Louis J.
Dougherty Ralph H.
Fraunhofer-Gesellschaft zur Forderung der ange-wandten Forschung
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