Microminiature valve having silicon diaphragm

Details Microminiature valve having silicon diaphragm Microminiature valve having silicon diaphragm

1999-01-15

2000-05-02

Lee, Kevin

Valves and valve actuation

Reciprocating valve

Diaphragm

251368, F16K 31126

Patent

active

060562692

ABSTRACT:
Microminiature valve includes a valve seat substrate having opposed upper and lower major surfaces, a flow channel extending from said lower major surface to a port on an exterior surface of the microminiature valve, an integral valve seat structure extending from the upper major surface, the valve seat structure surrounding the flow channel and including a valve seat, and a recess located in a surround in the upper major surface, wherein the recess surrounds the valve seat structure. A diaphragm preferably formed of silicon is positionable by deflection against the valve seat substrate and includes an lower surface functional as a valve face and positionable in a closed position with respect to the valve seat to obstruct fluid flow through said flow channel, and in an open position with respect to the valve seat to permit fluid flow through said flow channel.

REFERENCES:
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patent: 5652398 (1997-07-01), Johnson
patent: 5922591 (1999-07-01), Anderson et al.
Dissertation by Stephen Clark Terry, Stanford University, Ph.D, E.E., May, 1975; "A Gas Chromatography System Fabricated On A Silicon Wafer Using Integrated Circuit Technology"; pp. 41-128. UMI Dissertation Services, Ann Arbor, MI.
James B. Angell, Stephen C. Terry and Phillip W. Barth, "Silicon Micromechanical Devices" Scientific American, Mar., 1983, pp. 44-55.
Stephen C. Terry, John H. Herman and James B. Angell, A Gas Chromatographic Air Analyzer Fabricated on a Silicon Wafer, IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec., 1979, pp. 1880-1886.

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