Microminiature vacuum tube manufacturing method

Details Microminiature vacuum tube manufacturing method Microminiature vacuum tube manufacturing method

1991-06-25

1993-12-14

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

156647, 445 50, 445 51, H01L 21465

Patent

active

052702588

ABSTRACT:
A method of manufacturing a microminiature vacuum tube includes forming a mask layer on a first surface of a monocrystalline substrate and removing the mask layer where a cathode is to be formed, anisotropically etching the monocrystalline substrate at the surface using the mask layer to form a recess in the substrate having a V-shaped cross-section, covering the V-shaped recess with an electron-emitting cathode material, successively forming a first insulator film, a gate material, a second insulator film, and an anode material on the second surface of the substrate, removing portions of the anode material, second insulator film, gate material, and first insulator film from a portion of the second surface opposite the V-shaped recess, and etching the monocrystalline substrate using the first insulator film as a mask until the tip of the cathode material is exposed. Uniformly shaped cathodes can be formed with good controllability and reproducibility according to the invention.

REFERENCES:
patent: 4149175 (1979-04-01), Inoue et al.
patent: 4983878 (1991-01-01), Lee et al.
patent: 5012153 (1991-04-01), Atkinson et al.
patent: 5090932 (1992-02-01), Dieumegard et al.
patent: 5126287 (1992-06-01), Jones
Spindt et al., "Physical Properties of Thin-Film Field Emission Cathodes With Molybdenum Cones", Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp. 5248-5263.

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