Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1993-03-23
1993-12-07
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 49, H01J 902
Patent
active
052678849
ABSTRACT:
A microminiature vacuum tube and a process for fabrication thereof. The tube is formed on a compound semiconductor substrate using solid state semiconductor fabrication techniques. A straight line path for electron flow is provided by forming an emitter and collector in the same plane. The emitter and collector are formed in a low resistance layer of a compound semiconductor substrate, such as by etching a recess through the low resistance layer and into the substrate to define a separate emitter and collector. Preferential etching techniques are utilized to form a sharp-edge in at least the emitter portion of the recess. A gate is formed in the recess proximate to but out of the plane for electron flow. The use of microminiature solid state fabrication technique allows the recess to be formed at submicron size to reduce the voltage requirements on the microminiature vacuum tube.
REFERENCES:
patent: 3814968 (1974-06-01), Nathanson et al.
patent: 4168213 (1979-09-01), Hoeberechts et al.
patent: 4513308 (1985-04-01), Greene
patent: 4578614 (1986-03-01), Gray et al.
patent: 4827177 (1989-05-01), Lee et al.
patent: 4853754 (1989-08-01), Van Gorkom et al.
patent: 4855636 (1989-08-01), Busta et al.
patent: 4904895 (1990-02-01), Tsukamoto et al.
patent: 5145438 (1992-09-01), Bol
patent: 5217401 (1993-06-01), Watanabe et al.
"A Vacuum Field Effect Transistor Using Silicon Field Emitter Arrays," by Gray et al., Proc. IEDM86 (1986), pp. 776-779.
"Vacuum Microelectronics," Junji ITOH, Electrotechnical Laboratory, Nov. 29, 1989, pp. 164-169.
"Lateral Cold Cathode Triode Structures Fabricated On Glass Substrates," by Busta, Amoco Technology Company, pp. 22-23.
Mitsubishi Denki & Kabushiki Kaisha
Ramsey Kenneth J.
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