Microminiature vacuum tube

Details Microminiature vacuum tube Microminiature vacuum tube

1991-01-22

1993-09-14

Yusko, Donald J.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313306, 313308, 313311, 313336, 313351, 313355, H01J 1924

Patent

active

052452476

ABSTRACT:
A microminiature vacuum tube and a process for fabrication thereof. The tube is formed on a compound semiconductor substrate using solid state semiconductor fabrication techniques. A straight line path for electron flow is provided by forming an emitter and collector in the same plane. The emitter and collector are formed in a low resistance layer of a compound semiconductor substrate, such as by etching a recess through the low resistance layer and into the substrate to define a separate emitter and collector. Preferential etching techniques are utilized to form a sharp-edge in at least the emitter portion of the recess. A gate is formed in the recess proximate to but out of the plane for electron flow. The use of microminiature solid state fabrication technique allows the recess to be formed at submicron size to reduce the voltage requirements on the microminiature vacuum tube.

REFERENCES:
patent: 3814968 (1974-06-01), Nathanson et al.
patent: 4168213 (1979-09-01), Hoeberechts
patent: 4513308 (1985-04-01), Greene
patent: 4578614 (1986-03-01), Gray et al.
patent: 4827177 (1989-05-01), Lee et al.
patent: 4853754 (1989-08-01), Van Gorkom et al.
patent: 4855636 (1989-08-01), Busta et al.
patent: 4904895 (1990-02-01), Tsukamoto et al.
"A Vacuum Field Effect Transistor Using Silicon Field Emitter Arrays", Gray et al., Proc. IEDM86, pp. 776-779; Dec. 1986.
"Vacuum Microelectronics", Junji Itoh, Electrotechnical Laboratory, Nov. 29, 1989, pp. 164-169.

Affiliated with

Also associated with

Rating

Microminiature vacuum tube does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microminiature vacuum tube, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microminiature vacuum tube will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2029975