Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – Plural light emitting devices
Patent
1993-10-20
1994-11-22
Hille, Rolf
Active solid-state devices (e.g., transistors, solid-state diode
Incoherent light emitter structure
Plural light emitting devices
313309, 313336, 313351, 445 50, H01J 130, H01J 902, H01L 21465
Patent
active
053671813
ABSTRACT:
A microminiature vacuum tube includes a single crystal semiconductor substrate having opposed first and second surfaces; a V-shaped groove extending into the substrate from the first surface; an aperture extending into the substrate from the second surface and intersecting the V-shaped groove; an electron-emitting material disposed on the substrate in the V-shaped groove, extending into the aperture, and having a sharp edge in the aperture; and a first insulating layer, a metal gate layer, a second insulating layer, and a metal anode layer successively disposed on the second surface of the substrate adjacent the aperture and spaced from the sharp edge of the electron-emitting material.
REFERENCES:
patent: 4149175 (1979-04-01), Inoue et al.
patent: 4307507 (1981-12-01), Gray et al.
patent: 4983878 (1991-01-01), Lee et al.
patent: 5012153 (1991-04-01), Atkinson et al.
patent: 5090932 (1992-02-01), Dieumegard et al.
patent: 5126287 (1992-06-01), Jones
patent: 5221221 (1993-06-01), Okaniwa
Spindt et al, "Physical Properties On Thin-Film Field Emission Cathodes With Molybdenum Cones", Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp. 5248-5263.
Lee et al, "Electron Emission At GEC", GEC Research Limited (no date).
Brown Peter Toby
Hille Rolf
Mitsubishi Denki & Kabushiki Kaisha
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