Microminiature force-sensitive switch

Details Microminiature force-sensitive switch Microminiature force-sensitive switch

1984-01-25

1985-09-24

Moose, Jr., Harry E.

Electricity: circuit makers and breakers

Fluid pressure

Diaphragm

200 6125, 200 6145R, 200 83V, 307117, H01H 3534

Patent

active

045434573

ABSTRACT:
A microminiature switch for digitizing different-valued external conditions, such as pressure, temperature of acceleration, is disclosed. The switch includes a silicon wafer having a deflectable, reduced-thickness membrane adapted to move from a relaxed position toward increasingly flexed or bulged positions in response to greater-value changes in such external condition. Movement of the membrane from its relaxed position to more strained positions establishes electrical contact between a common terminal and first one and then progressively more switch-state terminals in the switch, wherein the number of switch states which are closed corresponds to the external condition acting on the switch.

REFERENCES:
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patent: 2772330 (1956-11-01), Higgins
patent: 2780693 (1953-08-01), McClellan
patent: 3358196 (1967-12-01), Steinmetz, Jr. et al.
patent: 3397278 (1968-08-01), Pomerantz
patent: 3743801 (1973-07-01), Brobeck et al.
patent: 3961309 (1976-06-01), Eddy
patent: 4023415 (1977-05-01), Garcia
patent: 4401896 (1983-08-01), Fowler
K. E. Petersen, "Micromechanical Membrane Switches on Silicon", IBM J. Res. Develop., vol. 23, No. 40, Jul. 1979, pp. 376-385.
George Wallis, et al., "Field Assisted Glass-Metal Sealing", Journal of Applied Physics, vol. 40, No. 10, Sep. 1969, pp. 3946-3949.
D. P. Fazzio, "Circular Sequencing Contact", IBM Technical Disclosure Bulletin, vol. 13, No. 1, Jun. 1970, p. 219.

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