Micromechanics forming method and micromechanics

Details Micromechanics forming method and micromechanics Micromechanics forming method and micromechanics

1991-04-10

1993-09-14

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

H01J 37317

Patent

active

052451933

ABSTRACT:
A new method for forming on a substrate such micomechanics as a micro link mechanism by means of micromachining. The new method includes a process of implanting carbon ions to improve frictional properties of at least a slidable portion of the micromechanics formed. Micomechanics having their slidable portion made of a compound of silicon and such a dopant as carbon.

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patent: 4869781 (1989-09-01), Euen et al.
patent: 5041361 (1991-08-01), Tsuo
patent: 5123975 (1992-06-01), Irinoda et al.

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