Micromechanical vibration sensor

Details Micromechanical vibration sensor Micromechanical vibration sensor

1989-12-26

1991-03-26

Williams, Hezron E.

Measuring and testing

Vibration

Sensing apparatus

200 6145R, 200 6151, 200 6148, 200181, G01D 2100

Patent

active

050019333

ABSTRACT:
The bearing failure sensor includes a micromachined mechanical resonator h a conductive cantilevered beam mounted on a conventional insulating substrate to form a microchip. A conductive contact is mounted in close proximity to the free end of the conductive beam to form a gap. An integrated circuit is connected between the fixed end of the beam and the conductive contact. The microchip is mounted on a vibrating machine to be monitored. When vibrations having a given frequency and magnitude occur, the free end will vibrate and move sufficiently to close the gap completing a circuit and causing currents to flow that are detectable by the integrated circuit. Multiple resonators, having different gap sizes and natural resonant frequencies, may also be mounted on a single substrate to monitor vibrations at a plurality of different frequency and amplitude thresholds.

REFERENCES:
patent: 3413497 (1968-11-01), Atalla
patent: 3686593 (1972-08-01), Zakaria
patent: 4479389 (1984-10-01), Anderson
patent: 4543457 (1985-09-01), Petersen et al.
patent: 4673777 (1987-06-01), Bai et al.
patent: 4729239 (1988-03-01), Gordon
patent: 4740410 (1988-04-01), Muller et al.
patent: 4855544 (1989-08-01), Glenn
patent: 4873871 (1989-10-01), Bai et al.
patent: 4891984 (1990-01-01), Fujii et al.
Micromachine Magic, Popular Science, Mar. 1989, pp. 88-92.

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