Micromechanical valve for micromechanical dosing devices

Valves and valve actuation – Electrically actuated valve – Including solenoid

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Details

25112907, 251368, F16K 714

Patent

active

055382215

DESCRIPTION:

BRIEF SUMMARY
The invention relates to a micromechanical valve for micromechanical dosing devices, consisting essentially of at least three layers which are arranged one above the other, are connected unreleasably to one another and are coupled to an actuation element for activating the valve, the layers having planar structures for forming inlet and outlet channels and inlet and outlet chambers, the central layer being arranged as separating layer between the inlet and outlet and the outer layers being arranged as base layer and cover layer, respectively.
Such micromechanical valves are provided in particular for use in medical technology, for example for medication dosing or in laboratory analytical technology, but also in the automotive industry, the aerospace industry or the printing industry.
Micromechanical valves with multilayer structure are known from the literature, which can be produced by means of production technologies such as are used in the semiconductor industry. Said valves possess two pressure-medium connections and a valve seat which is connected between them and to which a closure element is assigned. In this arrangement, the closure element can be deflected by electrical or thermal actuation means and be moved against the electrical or thermal actuation means by means of a resilient diaphragm which is firmly connected to the closure element. The resilient diaphragm is integrated in one of the layers and adjoins a space acted on by pressure medium. For the pressure-force equalization, there is arranged a pressure-equalization surface acting against the diaphragm acted on by pressure.
By means of this solution, however, not complete pressure compensation but only a partial pressure equalization is achieved, since the compensation surface is significantly smaller than the surface to be compensated. The poor sealing behaviour of the valves is also disadvantageous because of the large circumference of the valve gap, since the closure element has to seal the inlet chamber over its entire width. In addition, when the valve is actuated, it passes through an unstable state, since the subatmospheric pressure below the compensation surface is suddenly relieved at the moment of opening. The dynamic loads thus occurring act at the connection points of the valve seat and compensation surface, having a negative effect on the expected lifetime of the valves. The production of such valves requires an elaborate and complicated structuring and assembly technology, only a narrow fault tolerance being permissible.
The object of the invention is therefore to develop a micromechanical valve for micromechanical dosing devices which switches media on and off variably, with extremely small dosing, over a long period of time with high reliability and a stable mode of operation, the. valve being constructionally designed such that, by uniform activation with a small energy requirement, it allows the use of small, effective drive elements, has a small space requirement and can be produced by means of simple assembly technologies.
The object is achieved according to the invention in that the separating layer is designed as a thin, elastic valve diaphragm with channel-forming and chamber-forming structures for inlet and outlet formed in both sides. It has a centre passage and is unreleasably connected to the cover layer in its central region and is connected to the base layer releasably in such a manner that the throughflow for the medium is ensured via inlet channel, inlet chamber, passage and, in the opened state, outlet chamber, outlet channel. The actuation element is in this arrangement arranged on the cover layer designed as a thin drive diaphragm.
According to the further embodiment for achieving the object according to the invention, all channel-forming and chamber-forming structures for inlet and outlet are formed in both sides of the separating layer in such a manner that the centres of gravity of their areas lie one above the other and the remaining residual layer forms the valve diaphragm. In this case, the inlet cha

REFERENCES:
patent: 4826131 (1989-05-01), Mikkor
patent: 5085562 (1992-02-01), van Lintel
patent: 5176358 (1993-01-01), Bonne et al.
patent: 5216273 (1993-06-01), Doering et al.
Patent Abstracts of Japan, vol. 15, No. 290 (M-1139) 1991 of Japan 31 03 680 (Yokogawa).

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