Micromechanical transducer

Details Micromechanical transducer Micromechanical transducer

1992-10-30

1995-04-18

Goldstein, Herbert

Optical: systems and elements

Optical modulator

Light wave directional modulation

359291, G02B 700

Patent

active

054083559

ABSTRACT:
There is disclosed a micromechanical transducer having only one moving or movable part (1) and a stator (2), the part (1) being movable in relation to the stator and in the form of a flat member which is connected by spring arrangements, such as springs (6), to the stator. The movable part is capable of three-dimensional movement to implement a deflection.

REFERENCES:
patent: 3096656 (1963-07-01), Jackson
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4301683 (1981-11-01), Hartmann et al.
patent: 4345474 (1982-08-01), Deval
patent: 4615595 (1986-10-01), Hornbeck
patent: 4710732 (1987-12-01), Hornbeck
patent: 4819486 (1989-04-01), Kunkel et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 5083857 (1992-01-01), Hornbeck
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