Thermal measuring and testing – Determination of inherent thermal property – Thermal conductivity
Reexamination Certificate
2002-08-27
2008-11-18
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Determination of inherent thermal property
Thermal conductivity
C374S029000, C374S208000, C073S023250, C073S025030
Reexamination Certificate
active
07452126
ABSTRACT:
A micromechanical thermal-conductivity sensor is provided which includes a thermally insulated diaphragm formed by a recess in a base plate exhibiting poor thermal conductivity. At least one heating element is applied on the diaphragm, at least one temperature-dependent electrical resistor is applied on the diaphragm for measuring the temperature of the diaphragm, as well as at least one further temperature-dependent electrical resistor is applied outside of the diaphragm on the base plate for measuring the ambient temperature. On one or both of its sides, the diaphragm is covered by a porous cover plate permitting gas exchange by diffusion, a cavity being left open between the diaphragm and the porous cover plate.
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Arndt Michael
Lorenz Gerd
Kenyon & Kenyon LLP
Robert & Bosch GmbH
Verbitsky Gail
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