Micromechanical systems device comprising a displaceable...

Details Micromechanical systems device comprising a displaceable... Micromechanical systems device comprising a displaceable...

2002-09-20

2009-06-23

Nguyen, Thanh (Department: 2893)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Responsive to non-optical, non-electrical signal

C257SE27006

Reexamination Certificate

active

07550794

ABSTRACT:
In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

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