Micromechanical structure

Details Micromechanical structure Micromechanical structure

1992-02-03

1993-10-12

Warden, Robert J.

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

422 681, 422 8211, 422 63, 435287, 435300, G01N 2100, C12M 100

Patent

active

052522946

ABSTRACT:
A micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.

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patent: 4778989 (1988-10-01), Hagemayer et al.
patent: 4874500 (1989-10-01), Madou et al.
patent: 4895615 (1990-01-01), Muschke
Angell et al., "Silicon Micromechanical Devices", Apr. 1983, pp. 44-55.
Laser and Optoelectronik, No. 4, 1986, pp. 323-336.
W. A. Little, AIP Proceedings for Future Trends in Superconductive Electronics, p. 421, 1978.

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