Micromechanical sensor having an analyzer circuit

Details Micromechanical sensor having an analyzer circuit Micromechanical sensor having an analyzer circuit

2005-01-20

2010-06-29

Valone, Thomas (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S661000, C324S691000, C073S504120, C340S669000

Reexamination Certificate

active

07746085

ABSTRACT:
A micromechanical sensor having an analyzer circuit and at least two detecting elements, each of the two detecting elements being connected to the analyzer circuit by at least one signal line. At least one signal line is connected to both detecting elements.

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Rodjegard et al., “A differential charge-transfer readout circuit for multiple output capacitive sensors” Sensors and Actuators A, V. 119, (2005), p. 309-315.

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