Micromechanical sensor for measuring the mass flow rate in...

Measuring and testing – Volume or rate of flow – Mass flow by imparting angular or transverse momentum to the...

Reexamination Certificate

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Reexamination Certificate

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07874219

ABSTRACT:
In a micromechanical sensor (11) for measuring a mass flow rate in accordance with the Coriolis principle, two line sections (13) are mounted in a suspension means (24) such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer (18) is provided between the layers (12a,12b) forming the line sections (13), the spacer layer ensuring that there is a space between the line sections (13) in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections (13) as they approach one another.

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