Micromechanical sensor employing a SQUID to detect movement

Details Micromechanical sensor employing a SQUID to detect movement Micromechanical sensor employing a SQUID to detect movement

1990-11-13

1992-11-24

Strecker, Gerard R.

Electricity: measuring and testing

Magnetic

Displacement

73651, 32420722, 324248, 324262, 505846, G01B 714, G01D 2100, G01H 1102, G01R 33035

Patent

active

051666120

ABSTRACT:
A micromechanical sensor comprises a support, a micromechanical element that is movable relative to the support under the application of a stimulus, and a transducer. The transducer comprises a first component carried by the micromechanical element and movable therewith, and a second component stationary relative to the support. One of the first and second transducer components is a member for establishing a magnetic field and the other of the first and second transducer components is a SQUID positioned in the magnetic field for detecting variation in the magnetic field due to relative movement of the micromechanical element and the support.

REFERENCES:
patent: 4500295 (1985-02-01), Insinger, III et al.
patent: 4804915 (1989-02-01), Hoenig
patent: 4806859 (1989-02-01), Hetrick
patent: 4867237 (1989-09-01), Hoenig
patent: 4912408 (1990-03-01), Sawada et al.
J. B. Angell, Stephen C. Terry and Phillip W. Barth, "Silicon Micromechanical Devices", Scientific American, vol. 248, No. 4, pp. 1-13, Apr. (1983).
J. Clarke, "SQAUIDS, Brains and Gravity Waves", Physics Today, Mar. 1986, pp. 36-40.
Roger T. Howe and Richard S. Muller, "Silicon Micromechanics: sensors and actuators on a chip", IEEE Spectrum, Jul. 1990, pp. 29-31, 34 and 35.

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