Micromechanical sensor element

Details Micromechanical sensor element Micromechanical sensor element

2008-07-15

2008-07-15

Chapman, John E (Department: 2856)

Measuring and testing

Gas analysis

By vibration

C422S069000, C073S061750

Reexamination Certificate

active

10472632

ABSTRACT:
A micromechanical sensor element for recording the bonding of molecules to the micromechanical sensor element. The sensor element having a substrate and at least one electrical terminal. There is also an oscillatable element that is coupled to the electrical terminal in such a manner that an electrical variable that characterizes the oscillation behavior of the oscillatable element may be provided at the electrical terminal. Further, there is a molecule coupling layer, arranged in such a manner that molecules may bond to the molecule coupling layer. The molecule coupling layer is coupled to the oscillatable element in such a manner that bonding of molecules to the molecule coupling layer causes a change in the oscillation behavior of the oscillation element.

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