Micromechanical resonator having short support beams

Details Micromechanical resonator having short support beams Micromechanical resonator having short support beams

2005-08-16

2005-08-16

Wamsley, Patrick (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S348000

Reexamination Certificate

active

06930569

ABSTRACT:
The illustrative embodiment of the present invention is a vertical-mode, free-free beam resonator, and micromechanical circuits that include one or more such resonators. In accordance with the illustrative embodiment, the resonator comprises a movable beam that overlies a drive electrode. The movable beam is supported by a plurality of supports, the length of which is substantially less than one-quarter of a wavelength of the resonant frequency of the resonator.

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