Micromechanical resonator device having a desired mode shape

Details Micromechanical resonator device having a desired mode shape Micromechanical resonator device having a desired mode shape

2006-10-10

2006-10-10

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S199000

Reexamination Certificate

active

07119636

ABSTRACT:
A micromechanical resonate device having an extensional wine-glass mode shape is described herein. Different embodiments of the device may employ vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-glass mode shape to achieve lower impedance than previous UHF resonators at frequencies as high as 1.2-GHz with a Q of 3,700, and 1.47-GHz (highest to date for polysilicon micromechanical resonators) with a Q of 2,300. The 1.2-GHz resonator exhibits a measured motional resistance of 560 kΩ with a dc-bias voltage of 20V, which is 6× lower than measured on radial contour mode disk counterparts at the same frequency, and which can be driven down as low as 2 kΩ when a dc-bias voltage of 100V and electrode-to-resonator gap spacing of 460 Å are used. The above high Q and low impedance advantages, together with the multiple frequency, on-chip integration advantages afforded by electrostatically-transduced μmechanical resonators, may be utilized in the front-end RF filtering and oscillator functions needed by wireless communication devices.

REFERENCES:
patent: 6985051 (2006-01-01), Nguyen et al.
Wang, Jing, et al., 1.14-Ghz Self-Aligned Vibrating Micromechanical Desk Resonator, Tech. Dig. '03, Radio Frequency Integrated Circuits Symposium, Philadelphia, Pennsylvania, Jun. 8-10, 2003, pp. 947-950.
Clark, J.R., et al., High-Q VHF Micromechanical Contour-Mode Disk Resonators, Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, CA, Dec. 11-13, 2000, pp. 493-496.
Abdelmoneum, Mohamed A., et al., Stemless Wine-Glass-Mode Disk Micromechanical Resonators, Proceedings, 16thInt. IEEE Micro Electro Mechanical Systems Conf., Kyoto, Japan, Jan. 19-23, 2003, pp. 698-701.
Bircumshaw, Brian, et al., The Radial Bulk Annular Resonator: Towards A 50Ω RF MEMS Filter, Transducers '03, pp. 875-878.
Ambati, G., et al., In-Plane Vibrations of Annular Rings, Journal of Sound and Vibration, vol. 47, No. 3, Chapter 3, 1976, pp. 415-432.
Johnson, R.A., Mechanical Filters in Electronics, Chapter 3, Resonators and Coupling Elements, pp. 66-129, New York, NY: Wiley, 1983.
Bannon, F.D., et al., High-Q HF Microelectromechanical Filters, IEEE J. Solid-State Circuits, vol. 35, No. 4, Apr. 2000, pp. 512-526.

Affiliated with

Also associated with

Rating

Micromechanical resonator device having a desired mode shape does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromechanical resonator device having a desired mode shape, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromechanical resonator device having a desired mode shape will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3689259