Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-01-10
2006-01-10
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S199000
Reexamination Certificate
active
06985051
ABSTRACT:
A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.
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Abdelmoneum Mohamed A.
Nguyen Clark T.-C.
Brooks & Kushman P.C.
Summons Barbara
The Regents of the University of Michigan
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