Micromechanical potential sensor

Details Micromechanical potential sensor Micromechanical potential sensor

2007-09-25

2007-09-25

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Electrostatic field

Using modulation-type electrometer

C324S457000

Reexamination Certificate

active

10551112

ABSTRACT:
A potential sensor (101) including first and second detection electrodes (121a, b) opposed to an object of which a potential is to be measured, and a movable shutter (125) so positioned between the detection electrodes and the potential-measured object with gaps thereto; wherein the movable shutter can assume a first state and a second state, the first detection electrode is exposed to the potential-measured object wider when the movable shutter assumes the first state than when the movable shutter assumes the second state, and the second detection electrode is exposed to the potential-measured object narrower when the movable shutter assumes the first state than when the movable shutter assumes the second state.

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Riehl, P. S., “Microsystems for Electrostatic Sensing”, Dissertation, Nov. 2002, pp. 1-8, 32-40, 79-84.
Hsu, C. H. et al., “Micromechanical Electrostatic Voltmeter”, Proc. Int'l. Conf. on Solid State Sensors and Actuators, NY, IEEE, US, vol. Conf. 6, Jun. 24, 1991, pp. 659-662.

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