Micromechanical microwave switching

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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257415, 257619, H01L 2900

Patent

active

056190611

ABSTRACT:
Micromechanical microwave switches with both ohmic and capacitive coupling of rf lines and integration in multiple throw switches useful in microwave arrays.

REFERENCES:
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4959515 (1990-09-01), Zavracky et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5121089 (1992-06-01), Larson
patent: 5164688 (1992-11-01), Larson
patent: 5168249 (1992-12-01), Larson
patent: 5175521 (1992-12-01), Larson
patent: 5479042 (1995-12-01), James et al.
R. T. Howe et al., "Silicon Micromechanics: Sensors and Actuators on a Chip," IEEE Spectrum, Jul. 1980, pp. 29-35.
J. Bryzek et al., "Micromachines on the March," IEEE Spectrum, May 1994, pp. 20-31.
K. E. Petersen, "Dynamic Micromechanics on Silicon: Techniques and Devices," IEEE Transactions of Electron Devices, vol. ED-25, No. 10, Oct. 1978, pp. 1241-1250.
K. E. Peterson, "Micromechanical Membrane Switches on Silicon," IBM J. Res. Develop., vol. 23, No. 4, Jul. 1979, pp. 376-385.
K. E. Peterson, "Forming the Contact Surface of Micromechanical Switches," IBM Technical Disclosure Bulletin., vol. 25, No. 4, Sep. 1982, pp. 2048-2050.
K. E. Peterson, "Electrostatically Controlled Micromechanical Switches Fabricated from All-Amorphous Films on Arbitrary Substrates," IBM Technical Disclosure Bulletin., vol. 21, No. 9, Feb. 1979, pp. 3768-3769.
J. J. Yao, "A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC up to 4 Ghz," Transducers '95 - Eurosensors IX, Stockholm Sweden, Jun. 25-29, 1995, pp. 384-387.
R. Wright, "Sematech's Electrostatic Chuck Project," TI Technical Journal, Nov.-Dec. 1994, pp. 40-46.
D. Bosch et al., "A Silicon Microvalve with Combined Electromagnetic/Electrostatic Actuation," Sensors and Actuators A. 37-38 (1993), pp. 684-692.
Xi-Qing Sun, "Study of Fabrication Process of a Micro Electrostatic Switch and its Application to a Micro-mechanical V-F Converter," Sensors and Actuators A. 32 (1993), pp. 189-192.

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