Micromechanical magnetic devices

Details Micromechanical magnetic devices Micromechanical magnetic devices

1992-12-30

1994-07-05

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 42, 310DIG6, H02K 1500, H02K 5700

Patent

active

053270339

ABSTRACT:
Micromechanical devices are formed on a substrate using a sacrificial layer deep X-ray lithography process to produce a rotating microrotor which is driven magnetically. The rotor typically has a diameter of a few hundred microns or less and is formed as a free structure which is assembled onto a hub formed on a substrate. Stator pole pieces are formed on the substrate of a ferromagnetic material surrounding the rotor, and are also preferably formed by a deep X-ray lithography process followed by electroplating of a ferromagnetic material such as nickel. The stator pole pieces are supplied with magnetic flux, such as from a current flowing through a conductor surrounding the magnetic pole pieces which is integrated with the pole pieces on the substrate. Separate electromagnets can also be utilized to provide the magnetic flux to the pole pieces to provide a rotating magnetic field in the region of the rotor to drive the rotor.

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