Micromechanical infrared source

Details Micromechanical infrared source Micromechanical infrared source

2007-10-09

2007-10-09

Kim, Robert (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S495100, C250S493100, C219S543000, C219S553000, C338S308000

Reexamination Certificate

active

10996285

ABSTRACT:
A device for generating infrared radiation includes at least one heating element and at least one radiating element for irradiating the infrared radiation. The heating element is a micromechanical, two-dimensional heater structure. The heating element may be applied on the radiating element using hybrid technology such that the radiation element has at least one side facing the heating element and at least one side facing away. The radiating element may be ceramic substrate.

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