Micromechanical flow sensor with tensile coating

Details Micromechanical flow sensor with tensile coating Micromechanical flow sensor with tensile coating

2006-12-26

2006-12-26

Hoang, Tu (Department: 2832)

Electrical resistors

Resistance value responsive to a condition

Fluid- or gas pressure-actuated

C338S0220SD, C338S047000

Reexamination Certificate

active

07154372

ABSTRACT:
A sensor integrated on a semiconductor device (1), in particular a flow sensor, comprises a measuring element (2) on a membrane (5). In order to prevent a buckling of the membrane (5) a tensile coating (9) is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip (1) uncovered, such that their electrical properties are not affected.

REFERENCES:
patent: 4478076 (1984-10-01), Bohrer
patent: 4841769 (1989-06-01), Porth et al.
patent: 4966037 (1990-10-01), Sumner et al.
patent: 5006421 (1991-04-01), Yang et al.
patent: 5050439 (1991-09-01), Thompson
patent: 5703287 (1997-12-01), Treutler et al.
patent: 6030709 (2000-02-01), Jensen et al.
patent: 6098455 (2000-08-01), Nukui et al.
patent: 6234016 (2001-05-01), Bonne et al.
patent: 6240777 (2001-06-01), Treutler et al.
patent: 6250150 (2001-06-01), Azumi
patent: 2002/0007673 (2002-01-01), Tanimoto et al.
patent: 2002/0011104 (2002-01-01), Yamakawa et al.
patent: WO 0198736 (2001-12-01), None
F. Mayer, Thermal CMOS Anemometers, 1998. Ph.D. Thesis 12741 of the Swiss Federal Institute of Technology Zürich: 37-51.
U. Münch et al., Industrial Fabrication Technology for CMOS Infrared Sensor Arrays 1997, Transducers '97, International conference on Solid State Sensors and Actuators. IEEE1997.
F. Mayer, Thermal CMOS Anemometers, 1998 Ph.D. Thesis 12741 of the Swiss Federal Institute of Technology Zürich: 37-51.

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