Micromechanical elements and methods for their fabrication

Details Micromechanical elements and methods for their fabrication Micromechanical elements and methods for their fabrication

1987-05-28

1988-04-26

Powell, William A.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including aperture

156643, 156644, 156651, 156653, 156656, 156657, 156662, 428138, 428174, 428597, 428603, H01L 21306, B44C 122, C03C 1500, C23F 102

Patent

active

047404108

ABSTRACT:
A method and the product resulting from the method, for making a microminiature structure with two or more members measuring less than 1000 micrometers in any linear dimension and relatively movable to each other, comprising the steps of (a) providing a first sacrificial coating over a substrate having openings therethrough to expose a portion of the substrate, (b) depositing a first structural layer over the first sacrificial coating and the exposed portion of the substrate, with openings therethrough to expose a second portion of the substrate, (c) providing a second sacrificial coating over the second exposed portion of the substrate and said first structural layer, with openings through both the first and second sacrificial layers to expose a third portion of the substrate, (d) adding a second structural layer thereover and defining it, (e) possibly adding alternately other sacrificial coatings and other structural layers, and (f) etching the first and second and other sacrificial layers to remove them completely so that the two or more structural layers become movable relative to each other.

REFERENCES:
patent: 3407476 (1968-10-01), Hamren
patent: 3846166 (1974-11-01), Saiki et al.
patent: 4021766 (1977-05-01), Aine
patent: 4070752 (1978-01-01), Robinson
patent: 4262399 (1981-04-01), Cady
patent: 4566935 (1986-01-01), Hornbeck
patent: 4654676 (1987-03-01), Itano et al.

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