Micromechanical contact load force sensor for sensing magnitude

Details Micromechanical contact load force sensor for sensing magnitude Micromechanical contact load force sensor for sensing magnitude

1995-08-07

1997-08-12

Chilcot, Richard

Measuring and testing

Dynamometers

Responsive to multiple loads or load components

73862, G01D 700, G01L 300

Patent

active

056567855

ABSTRACT:
A micromechanical contact load force sensor is disclosed. The force sensor comprises an array of capacitive load cells on a substrate. The force sensor is able to sense high loads, on the order on 10.sup.9 N/m.sup.2, and distribute the load over a suitable number of the cells of the array while minimizing crosstalk between adjacent cells. The force sensor is useful in biological and robotic applications.

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